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# What is NXellipsometry? | ||
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The [NXellipsometry](https://fairmat-nfdi.github.io/nexus_definitions/classes/contributed_definitions/NXellipsometry.html#nxellipsometry) NeXus application definition is a standard for converting ellipsometry data to make it FAIR. | ||
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# How to use it? | ||
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Navigate to the examples directory. Therein, execute the following command | ||
which instructs the `ellips` reader to convert the example data using the `NXellipsometry` NeXus application definition resulting in a NeXus/HDF5 file: | ||
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```shell | ||
dataconverter --reader ellips --nxdl NXellipsometry eln_data.yaml --output SiO2onSi.nxs | ||
``` | ||
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# Are there detailed examples? | ||
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Yes, [here](https://gitlab.mpcdf.mpg.de/nomad-lab/nomad-remote-tools-hub/-/tree/develop/docker/ellips) you can find an exhaustive example how to use `pynxtools` for your ellipsometry research data pipeline. |
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Data: | ||
data_identifier: 1 | ||
data_software: WVASE | ||
data_software/@url: https://www.jawoollam.com/ellipsometry-software/wvase | ||
data_software/version: '3.882' | ||
data_type: Psi/Delta | ||
spectrum_type: wavelength | ||
spectrum_unit: angstrom | ||
Instrument: | ||
Beam_path: | ||
Detector: | ||
count_time: | ||
unit: s | ||
value: 1.0 | ||
detector_type: CCD spectrometer | ||
focussing_probes: | ||
angular_spread: | ||
unit: rad | ||
value: 0.2 | ||
data_correction: false | ||
light_source: | ||
source_type: arc lamp | ||
rotating_element: | ||
revolutions: 50.0 | ||
Sample_stage: | ||
environment_conditions: | ||
medium: air | ||
stage_type: manual stage | ||
angle_of_incidence/@unit: degrees | ||
calibration_status: no calibration | ||
company: J. A. Woollam Co. | ||
ellipsometer_type: dual compensator | ||
model: RC2 | ||
model/@version: 0.0.1 | ||
rotating_element_type: compensator (source side) | ||
software: CompleteEASE | ||
software/@url: https://www.jawoollam.com/ellipsometry-software/completeease | ||
software/version: '6.37' | ||
Sample: | ||
atom_types: Si, O | ||
backside_roughness: false | ||
chemical_formula: SiO2 | ||
layer_structure: 2nm SiO2 on Si | ||
sample_history: Commercially purchased sample | ||
sample_name: 2nm SiO2 on Si | ||
sample_type: multi layer | ||
substrate: Si | ||
User: | ||
address: Zum Großen Windkanal 2, 12489 Berlin, Germany | ||
affiliation: Humboldt-Universität zu Berlin | ||
email: [email protected] | ||
name: Name Surname | ||
colnames: | ||
- type | ||
- wavelength | ||
- angle_of_incidence | ||
- Psi | ||
- Delta | ||
- err.Psi | ||
- err.Delta | ||
derived_parameter_type: depolarization | ||
experiment_description: RC2 scan on 2nm SiO2 on Si in air | ||
experiment_identifier: exp-ID | ||
experiment_type: NIR-Vis-UV spectroscopic ellipsometry | ||
filename: test-data.dat | ||
plot_name: Psi and Delta | ||
sep: \t | ||
skip: 3 | ||
start_time: '2022-01-27T03:35:00+00:00' |
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